KLA-Tencor Surfscan 6200 (SFS 6200) Wafer Surface Contamination Analysis System

KLA-Tencor Surfscan 6200 (SFS 6200) Wafer Surface Contamination Analysis System
KLA-Tencor Surfscan 6200 (SFS 6200) Wafer Surface Contamination Analysis System
KLA-Tencor Surfscan 6200 (SFS 6200) Wafer Surface Contamination Analysis System
KLA-Tencor Surfscan 6200 (SFS 6200) Wafer Surface Contamination Analysis System
KLA-Tencor Surfscan 6200 (SFS 6200) Wafer Surface Contamination Analysis System
KLA-Tencor Surfscan 6200 (SFS 6200) Wafer Surface Contamination Analysis System


$250000.0 Buy It Now or Best Offer
free,30-Day Returns





Seller Store semiphoton
(14) 0.0%,

Location: San Francisco, California
Ships to: US,
Item: 116315203645

Restocking Fee:No
Return shipping will be paid by:Buyer
All returns accepted:Returns Accepted
Item must be returned within:30 Days
Refund will be given as:Money back or replacement (buyer’s choice)
KLA-Tencor:KLA-Tencor
MPN:6200

KLA-Tencor Surfscan 6200 (SFS 6200) Wafer Surface Contamination Analysis System (The SFS 6200 tool is used for wafer surface contamination analysis of unpatterned semiconductor wafers) Condition: Operational, Refurbished, Calibrated & Tested Warranty: 30 Days Country of origin: USA Manufacturer: KLA-Tencor Specifications • Substrate Sizes: 100mm, 125mm, 150mm, 200mm wafers • Substrate Material: Silicon or any opaque, polished surface which scatters less than 5% of incident light. • Defect Sensitivity: 0.09µm diameter PSL sphere equivalent with greater than 80% capture rate • Haze Sensitivity: 0.02ppm • Haze Resolution: 0.002ppm • Repeatability: 0.5% at 1σ (mean count greater than 500, 0.364 µm diameter latex spheres) • Accuracy: ≥99% (verified with VLSI Standards) • Dynamic Range: 0.09µm to 9,999µm in a single measurement. • Throughput: Up to 150 w/hr using 150mm wafers • Cassette Handling: Single puck wafer handling from two cassette (one sender/receiver, one receiver) • Illumination Source: New Solid State Laser with power supply/control box (488 nm, 30mW) • Operator Interface: New LCD monitor, keyboard, mouse • Color coded defect maps, histograms, magnified views of individual defects. • Operation System and Software: Windows 98, ver. 4.2 • Manual Physical Characteristics • Height: 168 cm (66”) Width: 75 cm (29.5”) Depth: 77 cm (30.25”) • Instrument Weight: 240 kg (530 lbs) • Shipping Weight: 300 kg (670 lbs) Installation Requirements • Vacuum: 508 mm (20 in.) Hg • Electrical: 220-240V, 50/60 Hz • Power Requirement: 2 kVA • Ducted Venting: Two 102 mm (4”) exhaust hoses • Environment: Class 10 or better Quality Control: The SFS 6200 is calibrated and tested to verify compliance to specifications. Purchase: To purchase, please click the “Buy It Now” button. Follow to the next page for payment instructions. Payment: Click the “Pay Now” button at the top of the E-Bay page to proceed with the checkout and payment process. Payment must be made within 3 days of purchase. Accepted Forms of Payment: We accept PayPal and direct Bank to Bank Wire Transfers. When paying via PayPal, payments must include your shipping address and should be submitted via the E-bay payment process. When paying via wire transfer, please contact us for the Invoice with wire transfer instructions. Sales Tax: For California customers, sales tax 9.75% is added and depends upon your location. If you are tax exempt, please provide a copy of your Tax Exempt Certificate prior to check out. Please do not send payment before receiving a revised invoice. Shipping Terms: (EXW) Ex-Works San Francisco, California, USA Shipping rates are the responsibility of the customer and are not refundable. Rates include handling, packaging materials, label scanning and tracking information. Shipping rates are based upon the weight and dimensions of the package/crates and your location. Please contact us prior to shipment. Local Pick Up: Local pick up is available. Please contact us to arrange a pick up. Refurbishment Time: 6-8 Weeks International Shipping: International shipping is determined on a case by case basis. We reserve the right to refuse shipment to certain locations/customers if all our requirements are not met. All documentation and customs reports are to be prepared by the purchasing party and provided prior to pick up. 48 Hour notice is a minimum required notice prior to International pick up. Insurance is required on all International orders. Please note, these products are subject to export restrictions under U.S. law. The Bureaus of U.S. Census and the Bureau of Industry and Security (BIS) regulate exports through the Export Administration Regulations (EAR). We DO NOT sell any items to any locations in Country Group E. In order to comply with export control laws established by the US Department of Commerce and the US Department of State, we require a written statement defining the ultimate End User, the End Use of each product to be exported and the buyers agreement to comply with the Export Administration Regulations (EAR). You will be contacted via email with the appropriate documents that will need to be returned to us in order to complete your order, please be advised that we cannot complete your order if you do not provide all of the data requirements. International Orders are subject to duties, taxes or other Import Fees; the bidder/buyer is solely responsible for these fees, documents and transportation if held at a customs office in the destination country. In the event that you have questions about international shipping logistics please contact us before purchase. Inquiries: Please contact us with any questions you have. While we are closed over the weekend, we will make every effort to answer your questions as soon as possible. Most questions are answered in less than 24 hours. Installation: Professional installation service is available upon request at additional cost. Please contact us if you need installation and we’ll include it in the Invoice. Training: Basic maintenance and operation training is available upon request at additional cost. Please contact us if you need training and we’ll include it in the Invoice. Warranty: 30 days after shipment date, counting for parts. Consumable parts and tear and wear parts are excluded from this warranty. Buyer is responsible for defective item shipping costs. Upon receipt of the defective unit we will fully test the item in question, visually inspect the condition and verify the serial numbers, after this process we’ll ship new or repaired unit for replacement. If the state of the item is not as was described in the listing, we reserve the right to refuse refund/exchange. If it is evident the item was damaged due to improper installation or use, we reserve the right to refuse refund/exchange. We will not honor claims for any items which were uninsured and damaged during shipment. In case service engineer assistance is required during the warranty period, travel expenses, board and lodging will be charged at actual cost. 30 Days Return/Cancellation Policy: If you are not completely satisfied with your purchase and would like to cancel your purchase, please contact us within 30 days of your purchase and we will refund 90% of your purchase price minus 10% restocking fee. All items must be returned in the same condition if they left our facility/warehouse. It is required that original packaging materials be retained and returned with the product. If the item has been changed or tampered in any way from original condition, we reserve the right to refuse refund. Upon receipt of the unit we will fully inspect the condition, test it and verify the serial numbers. If the state of the item is not as was described in the listing, we reserve the right to refuse refund. If it is evident the item was damaged due to improper installation or use, we reserve the right to refuse refund. All returned shipments should be properly insured. We will not honor claims for any items which were uninsured and damaged during shipment. Buyer is responsible for return item shipping costs. Note: Some auction/listing pictures may be representational only. For any additional questions, tool pictures and details, please contact Semiphoton at sales@semiphoton.com or via eBay messaging system. Business Hours: 9am – 5pm (PST) Monday – Friday Warehouse Delivery Hours: 9am – 3pm (PST) Monday – Friday We are closed on Weekends and all major US holidays

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